Training Track 1 * 3 Foup Ports
Range: 1010 mm Linear Motion
* Main tool model
AMAT: Endura,
EMAX, Vantage
* Robot Model XU-RC350S-J01 XU-RC350D-1C06
Training Track 2 * 4 Foup Ports
Range: 1515 mm
Linear Motion
* Main tool model
AMAT: Varian_VIISTA
TEL: FSI_Antares
LAM: Sosel Etch
* Robot Model
XU-RC350D-J03
XU-RC350D-C03
Training Track 3 (Kawasaki) * Main tool model
AMAT: Reflexion CMP * Robot Model 3NS411B
